Optimization of ToF-SIMS depthprofiling in low-pressure ▫$H_2, C_2H_2, CO and O_2$▫ atmosphereEkar, Jernej (Avtor) Kovač, Janez (Mentor) Pelicon, Primož (Član komisije za zagovor) Mozetič, Miran (Član komisije za zagovor) thin filmssimulationsdoctoral dissertationsJ. Ekar20242026-04-20 11:52:21Doktorsko delo/naloga13719UDK: 543.51:533(043.3)COBISS_ID: 193761283sl