Spatial and energy distributions of sputtered atoms in thin film deposition techniquesMahne, Nastja (Avtor) Čekada, Miha (Mentor) Panjan, Matjaž (Komentor) Kovač, Janez (Član komisije za zagovor) Cvetko, Dean (Član komisije za zagovor) thin filmssimulationsdoctoral dissertationsN. Mahne20242026-04-20 13:37:19Doktorsko delo/naloga13720UDK: 539.216:533.5(043.3)COBISS_ID: 193654787sl