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Title:Spatial and energy distributions of sputtered atoms in thin film deposition techniques : doctoral dissertation
Authors:ID Mahne, Nastja (Author)
ID Čekada, Miha (Mentor) More about this mentor... New window
ID Panjan, Matjaž (Comentor)
ID Kovač, Janez (Member of the commission for defense)
ID Cvetko, Dean (Member of the commission for defense)
Files:.pdf Nastja_Mahne_PhD.pdf (6,19 MB)
MD5: C0119FEF7B11BB199DD0979DF26CF042
 
Language:English
Work type:Doctoral dissertation
Typology:2.08 - Doctoral Dissertation
Organization:MPŠ - Jožef Stefan International Postgraduate School
Keywords:thin films, simulations, doctoral dissertations
Place of publishing:Ljubljana
Place of performance:Ljubljana
Publisher:N. Mahne
Year of publishing:2024
Year of performance:2024
Number of pages:XIX, 127 str.
PID:20.500.12556/ReVIS-13720 New window
COBISS.SI-ID:193654787 New window
UDC:539.216:533.5(043.3)
Note:Besedilo v angl.;
Publication date in ReVIS:20.04.2026
Views:33
Downloads:0
Metadata:XML DC-XML DC-RDF
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Secondary language

Language:Slovenian
Title:Prostorske in energijske porazdelitve razpršenih atomov pri tehnikah za nanos tankih plasti : doktorska disertacija
Keywords:tanke plasti, naprševanje, simulacije, SRIM, razpršitveni koeficient, disertacije


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